Application of high precision peristaltic pump in semiconductor industry

Many laboratories and light industry manufacturers have very strict requirements for high-precision peristaltic pumps to ensure the accuracy of experimental results, reliability of data, continuity and stability of the production process. Therefore, in material transmission, determination of a variety of reagents and additional applications, the high-precision Peristaltic Pump has high transmission accuracy, good stability, easy operation and convenient maintenance.

The Transfer Peristaltic Pump has the functions of selecting flow rate, obtaining the required flow rate, setting the working time, starting the continuous cycle interval, and automatically calculating flow rate and transportation volume. When the amount of injection reaches the preset amount, it will automatically sound the alarm, and has power off data protection function, stop working after opening again, the last set of data will continue to be available.

Semiconductor manufacturing should always control the flow of liquid in process tools, and one of the trickier applications is chemical mechanical leveling (CMP). CMP tools can have a significant negative impact on yield, chemical use, and material integrity when they are unable to assign a consistent slurry rate to a polished substrate. Variations in wafer thickness, increased defect density, tool downtime, and increased wafer waste are just some of the problems that can occur due to poor process control.

High precision peristaltic pumps are ideal for the high purity and aggressive chemical environments of the semiconductor industry. For CMP, it provides the linearity and repeatability required to distribute point paste to the chip during polishing. Low shear forces are mild to CMP paste, and with variable speed operation, flow can be controlled over a wide range of operations to maintain process integrity.

Wafer flatness, high-precision peristaltic pumps that achieve slurry performance help achieve these goals by controlling slurry delivery and distribution. The non-invasive design of the high-precision peristaltic pump provides a straight-line flow path without dead flow zones of condensation, solidification and contamination of the slurry. The flow rate reached 0.5%. Not only does the slurry continue to flow to the polishing pad, but waste of slurry, chemicals, and deionized water is also reduced through steady fluid delivery. https://peristalticpump.bossgoo.com/multichannel-peristaltic-pumps/product-59408797.html